Wafer Inspection System MX61 & MX61L

Upright semiconductor inspection microscopes

With our long experience in the fields of industry and material science, Olympus provides many clear-cut solutions making electronic device inspections easier, quicker and more efficient.

The MX61/MX61L semiconductor inspection microscopes have been developed specifically to meet the demands of wafer inspection. These user-friendly microscopes allow operators to work in an ergonomically correct position and benefit from smoother operation throughout extended inspection periods. Productivity and integration of the instruments into the work area are, thereby, maximized.

Models

MX61: 6" and 8" wafer inspection

MX61L: 300mm wafer inspection

Olympus MX microscopes benefit every customer right from the start --- meeting their needs in full, without wasting time or money.

• Fast startup
• Easy operation
• Failure analysis
• Future expandability

Features and Benefits

Always optimum contrast

The integrated motorized aperture stop is automatically adjusted to the objective in use. Thus the best image quality for every magnification is achieved making routine inspections more comfortable for the eyes and increases the failure detection rate. inspection microscope MX61MX61LMX51

Various observation methods

The MX61 is equipped by default with brightfield and darkfield illumination. In addition it allows the insertion of a observation cube to achieve polarized light for differential interference contrast (DIC) or fluorescence illumination for the detection of resist layers and organic particles.

Intuitive ‘Frontal Control’ for faster operation

With the MX61 there is no long search for a comfortable position or the right controls. All important controls fall to hand at the front of the microscope close to the focusing knobs. Objective change as well as illumination and aperture stop adjustments can be operated without the need to take the eyes away from the eyepieces.

Space saving design

The small footprint and slim design of the MX61 makes it easy to arrange workplaces that are cost effective and practical. The slim frame design reduces the transfer distance from wafer handling systems to the microscope stage. This increases the wafer transfer speed thereby minimizing the contamination risk.

Ergonomic design

The MX61 fulfils the most recent SEMI S2/S8 standards ensuring reliable results and comfortable operation.

Ready for digital imaging

The MX61 is equipped with a PC interface that allows observing the microscope status. Thus objective magnifications can be automatically stored while taking a picture. This guarantees reliable image information for further processing and analysis.

New darkfield illuminator and newly designed objectives

The newly developed illuminator of the MX61 in combination with the new Plan Fluoride BD2 objectives provides up to 2 times better darkfield contrast than comparable microscopes in this class, thus making detection of finest defects much faster and more reliable.