MX61A
Wafer Inspection System



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MX61A - Page 2

High Imaging performance.

The best imaging performance, particularly that in Brightfield and Darkfield, has been increased through the introduction of the new UIS2 optical system. In brightfield observation, crisp, natural color reproduction has been achieved. In Darkfield image brightness been increased by an average of over four times as compared with the famous Olympus UIS series systems..

Intuitive ‘Frontal Control’ for faster operation

With the MX61 there is no long search for a comfortable position or the right controls. All important controls fall to hand at the front of the microscope close to the focusing knobs. Objective change as well as illumination and aperture stop adjustments can be operated without the need to take the eyes away from the eyepieces.

Brightfield image (UIS2)



Darkfield image (UIS2)

Darkfield image (conventional)

The active AF capable of observing a wide range of devices.

U-AFA2M series, a further advanced version of the active-type laser auto focuscapable of high speed and accuracy . The introduction of a newlydeveloped multi-spot sensor has enabled a substantial increase Autofocus stability by eliminating theeffects of vertical topography on the specimen. Now the new U-AFA2M can perform exceptionally well in all observation methods, faster more repeatably. The U-AFA2M series comprises VIS (Visible) type andVIS/DUV compatible type.

 

 

 

 

 

 


UIS2 objective lenses with the highest parcentration.

To accommodate the smaller field of view found in digital imaging, the centration accuracy between high-magnification objective lenses have been improved 2x over the famous UIS series lenses. This has made a dramatic improvement in image centration when high power objectives are used. This means that the use of video monitors for imaging has become even more convenient.

UIS2 Objective Lens

Brightfield

Darkfield

DIC

Fluorescence

Deep Ultraviolet

Near infrared light
VIS (the same location)

MX61A-Page 1

 

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