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MX61 & MX61L
Wafer Inspection System
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Wafer Inspection System MX61 & MX61L
Upright semiconductor inspection microscopes - Specifications
With our long experience in the fields of industry and material science, Olympus provides many clear-cut solutions making electronic device inspections easier, quicker and more efficient.
The MX61/MX61L semiconductor inspection microscopes have been developed specifically to meet the demands of wafer inspection. These user-friendly microscopes allow operators to work in an ergonomically correct position and benefit from smoother operation throughout extended inspection periods. Productivity and integration of the instruments into the work area are, thereby, maximized.
| Specifications |
| Model | MX61 | MX61L |
| Optical System |
UIS (Universal Infinity System) | |
| Microscope Stand |
Reflected
light illumination (F.N.26.5) 12v, 100W halogen lamp (pre-centering type) Brightfield/darkfield mirror plus 1 cube (option), exchange method Built-in motorized aperture diaphragm (Pre-setting for each objective, automatically open for darkfield observation) Transmitted light illumination*(F.N.26.5) *When transmitted illumination unit MX-TILLA or MX-TILLB is combined. Illumination by light source LG-PS2 and light guide LG-SF (12V, 100W halogen lamp) or their equivalent. 1)MX-TILLA: condenser (N.A.0.5), with aperture stop 2)MX-TILLB: condenser (N.A.0.6), with aperture stop and field stop Observation methods 1)Reflected light brightfield, 2)Reflected light darkfield, 3)Reflected light Nomarski DIC, 4)Reflected light simple polarizing, 5)Reflected light fluorescence, 6)Reflected light infrared (IR), 7)Transmitted light brightfield, 8)Transmitted light simple polarizing *Separate (optional) cubes are required for No.3, 4 and 5. *No.7 and 8 require combination with a transmitted illumination unit. |
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| Nosepiece | 1)
Motorized sextuple revolving nosepiece with slider
slot for DIC: U-D6REMC 2) Motorized quintuple BD revolving nosepiece with slider slot for DIC: U-D5BDREMC 3) Motorized centerable quintuple revolving nosepiece with slider slot for DIC: U-P5REMC Forward rotation by objective exchange button on the front panel of microscope, or directly by hand switch U-HSTR2 (user designation) |
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| Observation Tube |
1)
Super widefield erect image tilting trinocular tube
(F.N.26.5): MX-SWETTR 2) Others: Super widefield trinocular tube/Widefield binocular tube |
Super widefield erect image tilting trinocular tube (F.N.26.5): MX-SWETTR or U-SWETTR (MX-SWETTR is equipped for MX61L as standard.) |
| Stage | 1)
MX-SIC8R 8"x8" stage Stroke: 210x210mm (Transmitted light illumination area: 189x189mm) 2) MX-SIC6R2 6"x6" stage Stroke: 158x158mm (Reflected light use only) |
MX-SIC1412R2
14"x12" stage Stroke: 356x305mm (Transmitted light illumination area: 356x284mm) combination with MX-TILLB |
| Roller guide slide mechanism, belt drive system (no rack), grip clutch function (belt drive disengagement system) | ||
| Dimensions/ Weight |
Dimensions:
approx. 509(W) x 843(D) x 507(h)mm Weight: approx. 40kg (microscope stand only approx. 27kg) |
Dimensions:
approx. 710(W) x 843(D) x 507(h)mm Weight: approx. 51kg (microscope stand only approx. 31kg) |
| Electric System |
Built-in
reflected light source body 100-120V/220-240V,
1.9/0.9A, 50/60Hz Transmitted light source (LG-PS2) 100-120/220-240V, 3.0/1.8A, 50/60Hz |
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