Performing multiple tasks in a variety of ways is fundamental to today’s semiconductor manufacturing environment.

Based on the above concept, Olympus has developed a Dual-Engine solution - an Inspection-Engine and an Analysis-Engine - to provide flexibility to respond to future needs as they evolve. This will allow the automation of inspection/analysis in the semiconductor field to adapt to future needs over time.

The Dual-Engines fully bring out the high-performance of the MX61A, and provide automation, to fit your needs, for both inspection and analysis.

Features & Benefits

The Inspection-Engine flexibly meets evolving inspection needs. What controls the entire MX61A system as an Inspection-Engine is the operation unit. The observation conditions can be called up through the operation unit at any time, and sharing among multiple operators (observers) is also possible. Auto focus compatible with a wide range of observation methods, and detailed customized settings, provide a higher level inspection environment. 

Operation unit (MX-OPU61A)OPERATOR screen

New operation unit: the best way to adapt to any operating environment.

The operation unit provides three operation screens: OPERATOR,ENGINEER and FUNCTION screens. The OPERATOR screen is designed to enable the operator to perform efficient microscopic operations. On the ENGINEER screen, more advanced operations can be performed. On the FUNCTION screen, up to six observation condition settings are shown, and any of these complicated microscope operations can be brought up on the screen at a push of the corresponding button.

OPERATOR Screen

ENGINEER Screen

FUNCTION Screen

Magnifications/Observation method/AS adjustment/
Light intensity adjustment/DIC contrast/auto focus ON/OFF

Optimum observation conditions can be established.

The aperture diaphragm (AS) works in interlock with objective magnification switching and observation method switching, the parfocality between objective lenses can be adjusted, the retardation position in DIC observations can be specified, and so forth. All these functional settings can be established on the operation unit. In addition, three USER settings can be stored in memory so that a multiple of operators (observers) can share them and use the one appropriate for a specific purpose in microscopy.

Hand switch for tactile control

A hand switch is provided to allow the operator to perform microscopic inspections, such as switching of objective magnifications, switching of observational methods, etc., by touchtyping the keys on the hand switch. As one observational method is selected, an image is automatically captured according to the registered observation conditions. Using the hand switch, the operator can also switch between auto focus TRACE and ONE SHOT, tune auto focus finely, adjust the retardation position in DIC observations, adjust the brightness of a light source, or retract the stage to exchange a specimen.

Analysis-Engine

The Analysis-Engine can meet ever more sophisticated analysis needs.
What controls the entire MX61A system as an Analysis-Engine is the "Microscope control software".
This highly flexible software not only operates the microscope, but also controls peripheral equipment such as a digital camera or motorized stage.
Tasks which previously required multiple operations, such as sophisticated observation methods selecting Visible light and DUV light observation, can be done smoothly with a single click.
This software broadens the expandability of MX61A and supports advanced analysis requirements.

Microscope control software:MX2-BSW recipe example

The microscope control software MX2-BSW makes it possible to control microscope operations in a variety of ways, including AF, motorized units such as the DUV observation system and motorized stage*1, etc. A digital camera*2 can also be controlled. If the operator clicks a point of interest on a live image shown on the monitor using the motorized stage, he or she can jump to the center of a field of view instantly. This makes it easier to perform a series of operations, including live measurement, image recording, etc., easily and efficiently.

*1.The model is recommended by Olympus.
*2. The Olympus DP20 or a digital camera compatible with IEEE1394 can be used.

Easily customizable software.

The user can customize the operation screen to make it easier to use; for example, customizing the position, size, etc., of the control button. If a set of operations are registered by combining action commands, a click on the registered set of operations allows the operator to perform microscope operations fully automatically.

The combined use of PC and operating unit controls is possible.

Microscope operations can be controlled from the operating parts (hand switch and joystick handle) that work independent of a PC.
The feature whereby main microscope operations can be performed from the hand switch adds to the ease and comfort of microscope operations.

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