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MX61A
Wafer Inspection System
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Wafer Inspection System MX61A
Upright semiconductor inspection microscopes - Specifications
Performing multiple tasks in a variety of ways is fundamental to today’s semiconductor manufacturing environment.
Based on the above concept, Olympus has developed a Dual-Engine solution - an Inspection-Engine and an Analysis-Engine - to provide flexibility to respond to future needs as they evolve. This will allow the automation of inspection/analysis in the semiconductor field to adapt to future needs over time.
The Dual-Engines fully bring out the high-performance of the MX61A, and provide automation, to fit your needs, for both inspection and analysis.
| Specifications |
| Model | MX61A |
| Optical System |
Universal Infinity System (UIS2/UIS) optics |
| Illumination system | Reflected light illumination system (FN 26.5) 12 V, 100 W halogen bulb (pre-centered). Motorized brightfield/darkfield selection by mirror + 1 mirror unit (* optional). * Any desired observation mirror unit can be added. Motorized aperture iris diaphragm built in. (Preset value for each objective lens, opened automatically for DF observation.) Available reflected light observation methods: [1]Brightfield; [2]Darkfield; [3]DIC; [4]Simplified Polarized Light; [5]Fluorescent Light; [6]near IR; [7]DUV [7]requires MX2-BSW (PC) and cannot be configured with the MX-OPU61A operation unit. |
| Electrical system | BX-UCB control box (12 V, 100 W). Input rating: 100-120/220-240 V AC, 50/60 Hz, 3.5/1.5 A Indicator LEDs: RMT (Remote) LED, ERR (Error) LED, module installation check LEDx 10. Option slots: Power capacity (single slots) |
| Motorized focusing mechanism | High-rigidity, 2-guide cross-roller guide system Ball screw + Stepping motor drive. Stroke: 25.4 mm. Fine adjustment sensitivity: Below 1 µm. Resolution: 0.01 µm. Maximum speed: 5 mm/sec. (Default: 3 mm/sec.) Maximum load (including the stage holders) • MX-STSP10: 10 kg • MX-STSP15: 15 kg • MX-STSP22: 22 kg |
| Auto focusing unit (optional) | Pupil-division reflection active auto focusing using a laser diode and 2-division detector. Multi-spot projection. Laser wavelength: 785 nm (Class 1: JIS C6802 (2005), IEC60825-1 (2001), CDRH). Tracking range : 5x: ±5000 µm and more 10x: ±2000 µm, 20x: ±1100 µm, 50x: ±400 µm, 100x: ±100µm, 150x:±50 µm, DUV: ±50 µm (only for DUV) The tracking range is dependent on the specimen reflectivity and objective lens in use. |
| Observation tube | Super-widefield erect image trinocular tube (FN 26.5) MX-SWETTR (Optical path select 100:0, 0:100, tube inclination angle 0 to 42 degrees) U-SWETTR-5 (Optical path select 100:0, 20:80, tube inclination angle 0 to 35 degrees) Infra-red wide field trinocular tube (FN 22) U-TR30IR (Optical path select 100:0, 0:100, tube inclination angle 30 degrees (fixed). |
| Motorized revolving nosepiece | Brightfield 6-position motorized revolving nosepiece: U-D6REMC, Brightfield/darkfield 5-position motorized revolving nosepiece: U-D5BDREMC, Brightfield/darkfield 5-position centerable motorized revolving nosepiece: U-P5BDREMC, Brightfield/darkfield 6-position motorized revolving nosepiece: U-D6BDREMC |
| UV248 optical system (optional) | Wavelength: 248 ±4 nm Light source: 80W mercury xenon lamp Objective lens: Exclusive DUV objective lens / NA 0.9, WD 0.2 mm Intermediate magnification: 2.5x Filed number: 12.5 (Actual field of view 50 µm) Usage environment: 23±5°C Brightness adjustment: Motorized controlled from 0 through 100 % transmission UV light guide: 2 m long or 5 m long Controlled via PC only |
| Controllers | Operation Unit MX-OPU61A LCD |
