Olympus MX50 Semiconductor Inspection Microscope

The first consideration was operator comfort, regardless of stature, for smooth operation that ensures fatigue-free inspection over long hours.

The MX50 offers the exceptional image quality of UIS optics and is designed to ensure accurate, efficient semiconductor inspection. The key requirements in semiconductor manufacturIng are to achieve both high integration complexity and high productivity. The MX50 Semiconductor Inspection Microscope was developed to specifically meet these needs and is the obvious choice in inspection microscopes.

Before even beginning development. Olympus conducted an exhaustive, three-year survey of operators executing wafer inspection to determine actual user demands for inspection microscopes. This detailed research involved intensive study of operator stature during inspection and the operational balance of both hands used in manipulating controls. it also research into optics to ensure the development of an ideal system that could accurately inspect the increasingly minuscule and multilayered semiconductors in production. What we developed is a truly user-friendly microscope that allows operators to work with a fatigue-free posture and benefit from smoother operation over extended inspection periods.

The MX50 also employs Olympus' proprietary UIS optical system to assure the best possible image quality. Amid increasing demands for advanced semiconductors. the MX50 emerges as a timely new instrument for more streamlined and accurate semiconductor inspection procedures.

Thanks to Olympus Frontal Control, inspection is fatigue-free for extended periods, whether the operator is seated or standing.

Controls are arranged in front of the microscope to prevent a stooped observation posture.Posture determines the degree of operator fatigue for extended inspection periods. With a conventional microscope design, focusing knobs, illumination intensity controls, magnification change switches and stage control panel are relegated to the back. With the MX50, they are positioned in front. The increased ease of access to the most frequently used knobs and switches maximizes operator comfort and reduces back strain.

Tilting observation tube with adjustable eyepoint height suits any operator

Using a conventional microscope without optimal eyepoint positioning, the operator is forced to view the specimen or semiconductor from an uncomfortable posture. The MX50 solves this with a U-SWETTR super widefield erect image tilting trinocular tube which allows continuous eyepiece inclination from0º - 35º to quickly enable the operator to find the most comfortable eyepoint position. The eyepoint extends 290mm forward from the optical axis to free the operator from having to push the neck forward during observation. If required, the observation tube can be also combined with an eyepoint adjuster to raise the eyepoint by 30mm.

Controls are within fingertip reach to minimize hand movement

The left hand controls lightning and magnification adjustments without leaving the focusing handle. Olympus eliminates unnecessary hand movements and increases inspection effectiveness by allowing efficient sharing of operation controls between the two hands. The focusing knobs, magnification change switches and illumination intensity controls are conveniently grouped on the front left site. This configuration, which arranges these adjustment functions within reach of the left of the fingertip, allows the operator to maintain concentration without having to remove eyes from the eyepieces during inspection. Arms and wrists do not have to raised from the work surface to manipulate controls, thus minimizing arm fatigue.

The right hand controls the smooth-operating, clutch-style stage handle

The newly developed MX-SIC8R 8"-6" stage features a new drive mechanism for effortless control of stage travel by the right hand. On a conventional microscope, clutch engagement and disengagement involves the knob control, which means the hand must be removed from the stage handle for each switchover of coarse and fine focus adjustments. However, the MX50's stage handle incorporates a clutch lever that allows manipulation of the clutch without releasing the stage handle. This new mechanism not only speeds up changeovers between coarse and fine adjustments, but means the operator's eyes do not have to be removed from the eyepieces when operating the clutch. the operator is thus free to concentrate on inspection.

A new, improved motorized revolving nosepiece Switches objectives more quickly The MX50's motorized revolving nosepiece features a significantly higher rotating speed for faster magnification changes. Not only is waiting time reduced, but operators are better able to concentrate on inspection.

The optional hand switch U-HS is available for direct selection of objectives.