MX50
Olympus MX50 Semiconductor Inspection Microscope



Features   Dimensions
         
Specifications      

Olympus MX50 Semiconductor Inspection Microscope Specifications

The first consideration was operator comfort, regardless of stature, for smooth operation that ensures fatigue-free inspection over long hours.

The MX50 offers the exceptional image quality of UIS optics and is designed to ensure accurate, efficient semiconductor inspection. The key requirements in semiconductor manufacturIng are to achieve both high integration complexity and high productivity. The MX50 Semiconductor Inspection Microscope was developed to specifically meet these needs and is the obvious choice in inspection microscopes.

 

Specifications
Item
MX50A
reflected light version
MX50T
reflected light/transmitted light version
Microscope stand Frame
  8" arm-integrated frame with built-in transformer for reflected light and power supply for driving the motorized revolving nosepiece.
 
  8" arm-integrated frame with built-in transformer for reflected/transmitted light (switchable) and power supply for driving the motorized revolving nosepiece.
Focus
  Coaxial coarse and fine focus, stage travel range: 32mm (2mm up and 30mm down for the stage surface), fine focus stroke per rotation: 0.1mm, minimum fine focus adjustment graduation: 1µm, sensitivity: 1µm or less
Revolving nosepiece
  Motorized quintuple nosepiece for brightfield/darkfield observation (adapter needed for brightfield objectives), magnification changeable via front panel switch or directly selectable via remote control unit (U-HS)
Incident illumination
  Brightfield/darkfield switchable via slider (also usable for Nomarski DIC and polarized light observation) 12V, 100W halogen bulb light source (xenon lamp housing mountable)
Aperture diaphragm, field diaphragm (with centering mechanism) and pinhole slider built in
Base illumination

-

12V, 100W halogen bulb light source
Condenser N.A.: 0.2 - 0.5
(with aperture iris diaphragm, fixed) 

Stage 8" x 8"
  Stroke: 210 x 210mm (transmitted light: 185 x 185mm), roller guide slide mechanism, belt drive system (no racks), stage holder with built-in clutch
6" x 6"
  Stroke: 158 x 158mm, roller guide slide mechanism, friction ring, triangular wire rail system (no racks), 4-step clutch disengagement
  For wafer
loader combination
  AL100-VS (vacuum stages) mountable
Observation tube   Invert
  Binocular tube, trinocular tube (F.N. 22), super widefield trinocular tube (F.N. 26.5)
  Erect
  Super widefield trinocular tube, super widefield tilting trinocular tube (F.N. 26.5)
Objectives  UIS objectives
  Eyepieces  UIS eyepieces (10x, 12.5x, 15x)
  Photo eyepieces  UIS photo eyepieces (2.5x, 3.3x, 4x, 5x)
  Power consumption  200VA xenon light source: 200VA)
  Weight
  Microscope stand: approximately 27kg. Combined with MX-SIC8R and U-SWETTR: approximately 38kg.

 

 

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